An excimer laser is a pulsed gas laser emitting ultraviolet radiation. The term “excimer” means a molecule consisting of two electronically excited atoms providing for chemical reactions. Obviously, the molecules binding an atom of halogen gas to an atom of rare gas do not exist in nature. So, a very powerful electric shock is used to produce a reaction to obtain the excited state of radiation. Basically, these lasers deliver a rectangular section beam with a nearly regular energy distribution. This beam is typically shaped through transition over a mask.
Courtesy of IREPA LASER
